Development of high damping structures in the precision machinery field
In ultra-precision machinery such as semiconductor manufacturing equipment and flat panel display manufacturing equipment, various vibrations caused by the drive motor inside the equipment and external vibration sources occur throughout the equipment including the structure, causing problems such as accuracy and throughput. equipment performance may be adversely affected.
As a measure to solve these vibration problems, Yokogawa Bridge has developed a high-damping structure that improves the damping performance of the structure. We believe that by using Yokogawa Bridge's high-damping structure, we can achieve higher precision, higher throughput, and higher speed equipment.
We will continue to develop technology and strive to further improve performance and develop new technologies.